SEMI F104 - Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems -

Abstract

This Document provides specifications and test methods to evaluate and compare components for particle contribution into an ultrapure water (UPW) fluid stream. Two methods for evaluating particle contribution are provided.

 

The rinse test method evaluates performance in a flushing mode while the component is in a static state (no actively moving components within the component under test). It provides an indication of the flush volume required to bring particle levels to specification.

 

The dynamic test method evaluates performance during component operation and provides an indication of the steady state particle contribution due to dynamic operating conditions.

These test methods apply to liquid chemical and UPW system components intended for use in semiconductor manufacturing tools and ancillary equipment.

 

This Document describes methods for measuring particle contribution from components while using UPW as the test media. UPW, for the intents and purposes of this Document, is defined as having the minimum requirements as outlined in ¶ 7.4 of this Document.

 

These methods use an in situ liquid optical particle measurement (OPM) instrument to quantify performance.

 

Referenced SEMI Standards (purchase separately)

SEMI E49 — Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies

SEMI F57 — Specification for Polymer Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

 

Revision History

SEMI F104-0520 (technical revision)

SEMI F104-0312 (technical revision)

SEMI F104-1107 (first published)

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