S00200 - SEMI S2 - 半導体製造装置の環境,健康,安全に関するガイドライン

Volume(s): Safety Guidelines
Language: Japanese
Type: Single Standards Download (.pdf)

NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version.

免責事項: このSEMIスタンダードは,投票により作成された英語版が正式なものであり,日本語版は日本の利用者各位の便宜のために作成したものです。万が一英語と日本語とに差異がある場合には英語版記載内容が優先されます。



本安全ガイドラインは,半導体製造装置で実現すべき,一連の環境,健康,安全(environmental, health, and safetyEHS))上の性能基準を提供する。

適用 本安全ガイドラインは,半導体製品の製造,測定,組立て,およびテストに使用される装置に適用される。


条項の優先順位 本安全ガイドラインの複数セクションの規定が相互に矛盾する場合は,当該技術問題を特定して取り扱うセクションが,より一般的な他のセクションに優先する。


Referenced SEMI Standards (purchase separately)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation
SEMI F5 — Guide for Gaseous Effluent Handling
SEMI F14 — Guide for the Design of Gas Source Equipment Enclosures
SEMI F15 — Test Method (SF6 Tracer Gas) for Enclosures Has Been Moved to SEMI S6
SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S3 — Safety Guideline for Process Liquid Heating System
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S7 — Safety Guidelines for Environmental, Safety, and Health (ESH) Evaluation of Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Guidelines for Equipment Decontamination
SEMI S13 — Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use with Semiconductor Manufacturing Equipment
SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S22 — Safety Guideline for the Electrical Design of Semiconductor Manufacturing Equipment

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