SEMI S13 - Environmental, Health and Safety Guideline for Documents Provided to the Equipment User for Use With Manufacturing Equipment -

Abstract

This Safety Guideline presents considerations for environmental, health and safety information in documents (such as operation, maintenance, installation and safety manuals) provided for use with manufacturing equipment in order to help reduce risk in operation, maintenance, and installation of equipment.

　

It is intended that personnel who operate, maintain, service, install, decontaminate or decommission equipment should read the documents provided to the equipment user that describe the tasks they are to perform.

　

This Safety Guideline applies to the documents provided to the equipment user to be used with equipment for production, measurement, assembling, and testing of products.

　

Referenced SEMI Standards

SEMI S1 — Safety Guideline for Equipment Safety Labels
SEMI S2 — Environmental Health, and Safety Guideline for Semiconductor Manufacturing Equipment
SEMI S6 — EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
SEMI S8 — Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment
SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process
SEMI S12 — Environmental, Health and Safety Guideline for Manufacturing Equipment Decontamination
SEMI S14 — Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
SEMI S16 — Guide for Semiconductor Manufacturing Equipment Design for Reduction of Environmental Impact at End of Life
SEMI S26 — Environmental Health, and Safety Guideline for FPD Manufacturing System

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