S03000 - SEMI S30 - Safety Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes

Volume(s): Safety Guidelines
Language: English
Type: Single Standards Download (.pdf)

E This Standard was editorially modified in April 2021 to add Note 76 and Note 77.

NOTICE: Conformance to the ‘should’ provisions of this Safety Guideline is necessary to declare conformance to this Document. Conformance to ‘may’, ‘suggested’, ‘preferred’, ‘recommended’, ‘NOTE’, or ‘Related Information’ provisions is not necessary to declare conformance.

This Safety Guideline is intended as a minimum set of safety criteria for the procurement, storage, handling, and use of energetic materials in semiconductor R&D and manufacturing processes in all phases of use, from process chemical supply through abatement.

This Safety Guideline is intended to be industry best practices as of its publication date.

The scope of this Document is energetic materials, as defined in ¶ 5.2.18 and the equipment which contains them.

This Safety Guideline specifies the testing and criteria for determining whether a material is an ‘energetic material’ in the context of this Safety Guideline.

This Safety Guideline also describes the minimum characterization data to be provided in research and development, pilot-line, or high-volume semiconductor manufacturing equipment.

This Safety Guideline provides safety design criteria for process chemical supply, process, and post-process equipment for semiconductor processes using energetic materials.

This Safety Guideline provides industry-specific criteria, and refers to some of the many international codes, regulations, standards, and specifications that should be considered when designing semiconductor manufacturing equipment.

Referenced SEMI Standards (purchase separately)

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI F5 — Guide for Gaseous Effluent Handling

SEMI F6 — Guide for Secondary Containment of Hazardous Gas Piping Systems

SEMI F66 — Specification for Port Marking and Symbol of Stainless Steel Vessels for Liquid Chemicals

SEMI F96 — Specification for Port Configuration on Canisters to Contain Liquid CVD Precursors

SEMI S1 — Safety Guideline for Equipment Safety Labels

SEMI S2 — Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment

SEMI S3 — Safety Guideline for Process Liquid Heating Systems

SEMI S6 — Environmental, Health, and Safety Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment

SEMI S7 — Safety Guideline for Evaluation of Personnel and Evaluating Company Qualifications

SEMI S8 — Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment

SEMI S10 — Safety Guideline for Risk Assessment and Risk Evaluation Process

SEMI S12 — Environmental, Health, and Safety Guideline for Manufacturing Equipment Decontamination

SEMI S13 — Environmental, Health, and Safety Guideline for Documents Provided to the Equipment User for Use with Manufacturing Equipment

SEMI S14 — Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment

SEMI S18 — Environmental, Health, and Safety Guideline for Flammable Silicon Compounds

Revision History

SEMI S30-0719E (editorial revision)

SEMI S30-0719 (first published)

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