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SEMI E168 - Specification for Product Time Measurement Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E166 - 450 mmクラスタモジュール・インタフェースのための仕様：機械的インタフェースおよび搬送のスタンダード Sale priceMember Price: $164.00
Non-Member Price: $215.00

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SEMI E166 - Specification for 450 mm Cluster Module Interface: Mechanical Interface and Transport Standard Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E165 - Guide for a Comprehensive Equipment Training System When Dedicated Training Equipment is not Available Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E160 - Specification for Communication of Data Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E159 - Specification for Mechanical Features of Multi Application Carrier (MAC) Used to Transport and Ship 450 mm Wafers Regular price$300.00 USD Sale price$180.00 USD

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SEMI E156 - Specification for Mechanical Interfaces Between 450 mm Automated Material Handling Systems (AMHS) Stocker to Transport Equipment Regular price$300.00 USD Sale price$180.00 USD

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SEMI E152 - 150 mm EUVLレチクル用EUVポッドの機械仕様 Sale priceMember Price: $164.00
Non-Member Price: $215.00

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SEMI E151 - Guide for Understanding Data Quality Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E149 - Guide for Equipment Supplier-Provided Documentation for the Acquisition and Use of Manufacturing Equipment Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E148 - 時刻同期とTS-CLOCKオブジェクト定義の仕様 Sale priceMember Price: $164.00
Non-Member Price: $215.00

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SEMI E145 - XMLにおける測定単位記号に関する分類 Sale priceMember Price: $164.00
Non-Member Price: $215.00

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SEMI E145 - Classification for Measurement Unit Symbols in XML Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E143 - Test Method for Measuring Power and Variation into a 50-Ω Load and Power Variation and Spectrum into a Load with a VSWR of 2.0 at any phase Angle Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E140 - Guide to Calculate Cost of Ownership (COO) Metrics for Gas Delivery Systems Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E136 - Test Method for Determining the Output Power of RF Generators Used in Semiconductor Processing Equipment RF Power Delivery Systems Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E134 - 데이터 수집 관리 사양 Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E130 - Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E129 - 半導体製造設備における静電気放電（ESD）の評価と制御へのガイド Sale priceMember Price: $164.00
Non-Member Price: $215.00

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SEMI E128 - XML メッセージ構造に関する仕様 Sale priceMember Price: $164.00
Non-Member Price: $215.00

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SEMI E125 - EQUIPMENT SELF DESCRIPTION 사양 Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E123 - ハンドラ装置の特定装置モデル（HSEM）のスタンダード Sale priceMember Price: $164.00
Non-Member Price: $215.00

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SEMI E12 - Guide for Standardized Pressure, Temperature, Density, and Flow Units Used in Mass Flow Meters and Mass Flow Controllers Sale priceMember Price: $138.00
Non-Member Price: $180.00

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SEMI E121 - Guide for Style and Usage of XML for Semiconductor Manufacturing Applications Sale priceMember Price: $138.00
Non-Member Price: $180.00