SEMI E31 - Specification for Electrical Interface, Japan Only

Volume(s): Equipment Automation Hardware
Language: English
Type: Single Standards Download (.pdf)
The purpose of this standard is to ensure common electrical interfaces that fulfill the requirements of equipment suppliers andusers in the Japan region and to ease the design and functionality of semiconductor equipment manufacturing facilities in the future.


Referenced SEMI Standards


Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00