SEMI E31 - Specification for Electrical Interface, Japan Only
Volume(s): Equipment Automation Hardware
Type: Single Standards Download (.pdf)
The purpose of this standard is to ensure common electrical interfaces that fulfill the requirements of equipment suppliers andusers in the Japan region and to ease the design and functionality of semiconductor equipment manufacturing facilities in the future.
Referenced SEMI Standards
Member Price: $113.00
Regular price Non-Member Price: $150.00