SEMI F85 - Specification for Dimension of One Port Components for 1.125 Inch Type Four Fastener Configuration Surface Mount Gas Distribution Systems -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
 

1  Purpose
1.1  This Standard establishes the properties and physical dimensions of one port components for 1.125 inch type surface mount gas distribution system.
2  Scope
2.1  This Standard includes common requirements, layout, size, detailed specifications, and dimensions of the components.
2.2  This Standard applies to one-port/four-fastener components. The components are mounted on substrates with fasteners accessible from the top.
2.3  This Standard only applies to components for systems, which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44.7 psia). This Standard also only applies to components with operating pressures less than 3445 kPa (500 psia) at 20°C.

Referenced SEMI Standards (purchase separately)
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications

Revision History
SEMI F85-1012 (technical revision)
SEMI F85-0312 (technical revision)
SEMI F85-0304 (first published)

Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.