SEMI F88 - Specification for Dimension of Standard Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

1  Purpose
1.1  This Standard establishes the properties and physical dimensions of mass flow controllers and mass flow meters for 1.5 inch type surface mount gas distribution systems.
2  Scope
2.1  This Standard includes common requirements, layout, size, detailed specifications, and dimensions of the components.
2.2  This Standard applies to standard size mass flow controllers and mass flow meters. The components are mounted on substrates with fasteners accessible from the top.
2.3  This Standard only applies to components for systems, which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44.7 psia). This Standard also only applies to components with operating pressures less than 3445 kPa (500 psia) at 20°C.

Referenced SEMI Standards (purchase separately)
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purposes, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications

Revision History
SEMI F88-1012 (technical revision)
SEMI F88-0312 (technical revision)
SEMI F88-0304E (editorial revision)
SEMI F88-0304 (first published)

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