SEMI F89 - Specification for Dimension of Compact Size Mass Flow Controllers and Mass Flow Meters for 1.5 Inch Type Surface Mount Gas Distribution Systems
This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 30, 2012. Available at www.semiviews.org and www.semi.org in October 2012; originally published March 2004; previously published March 2012.
This Standard establishes the properties and physical dimensions of mass flow controllers and mass flow meters for 1.5 inch type surface mount gas distribution systems.
This Standard includes common requirements, layout, size, detailed specifications, and dimensions of the components.
This Standard applies to compact size mass flow controllers and mass flow meters. The components are mounted on substrates with fasteners accessible from the top.
This Standard only applies to components for systems, which control flow of ≤50 slm nitrogen equivalent at 308 kPa (44.7 psia). This Standard also only applies to components with operating pressures less than 3445 kPa (500 psia) at 20°C.
Referenced SEMI Standards
SEMI E49.8 — Guide for High Purity and Ultrahigh Purity Gas Distribution Systems in Semiconductor Manufacturing Equipment
SEMI F20 — Specification for 316L Stainless Steel Bar, Forgings, Extruded Shapes, Plate, and Tubing for Components Used in General Purpose, High Purity and Ultra-High Purity Semiconductor Manufacturing Applications