SEMI E200 - Specification for Large JEDEC™ Tray Stack Load Port -

Abstract

1  Purpose
1.1  This Specification defines the dimensional requirements for a load port that can accommodate a single tray or a stack of JEDEC trays. It is intended to provide a uniform physical interface between the tray or tray stack and the equipment that processes units on the tray to facilitate automated delivery and pickup of the tray or tray stack.
2  Scope
2.1  This Specification defines a load port for Bx (large) trays specified by JEDEC DR4.10. The tray stack load port is intended to provide a standard interface when transferring a JEDEC tray stack from one equipment or equipment component to another within a cluster of equipment modules.
NOTE 1: The trays are not contained inside a carrier but will be delivered or picked up “bare” as a stack of trays. For large Bx JEDEC trays stored in a Large Tray Stack FOUP, SEMI E182-compatible load ports should continue to be used as the standard interface.
NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use.

Referenced SEMI Standards (purchase separately)
SEMI E84 — Specification for Enhanced Carrier Handoff Parallel I/O Interface
SEMI E182 — Specification for Panel FOUP Load Port for Panel Level Packaging
NOTE 2: The SEMI Physical Interfaces & Carriers Global Technical Committee has developed a Preliminary Specification for Large Tray Stack FOUP (LTSF), which will be used to transport and store JEDEC Bx trays.
NOTE 3: The Physical Interfaces & Carriers Global Technical Committee is developing a Preliminary Standard, Specification for Enhanced Handoff Interface that, in addition to SEMI E84, is intended to be used in conjunction with this Standard. The Enhanced Handoff Interface is expected to specify a handoff similar to SEMI E84, but with signals or states transmitted via TCP/IP. This future Standards Document is referred to as SEMI E84 TCP/IP in this Standard.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

Revision History
SEMI E200-0626 (first published)

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