SEMI M12 - Specification for Serial Alphanumeric Marking of Silicon Wafers -

Abstract

This Specification describes a coded alphanumeric marking of silicon or other semiconductor wafers. The wafer alphanumeric code links the properties of the wafer stored in an appropriate database system to each individual wafer for purposes of tracking and control during wafer and device manufacture. Use of this Specification ensures the consistency of all wafers marking performed by silicon manufacturers. This consistency allows simplification of the performance requirements of automatic optical character reading (OCR) equipment. In addition, the alphanumeric character size provides for human readability of the mark.

By defining the basic code used for the mark, this Specification provides the information needed, by human or machine vision, for practical operator interpretation and wafer tracking.

The alphanumeric marking of this Specification is valid for a broad range of wafer products (e.g., polished, epi, SOI, in-process and patterned wafers, etc.).

This Specification defines the geometric and spatial limits of the alphanumeric code, specifically for serial identification of flatted and notched silicon wafers.

This Specification does NOT address the marking techniques that may be employed when complying with this Standard.

This Specification does not address coding of wafer crystal properties that are provided in SEMI M13.

Referenced SEMI Standards (purchase separately)

SEMI M1 — Specification for Polished Single Crystal Silicon Wafers

SEMI M13 — Specification for Alphanumeric Marking of Silicon Wafers with Crystal Properties

SEMI M20 — Practice for Establishing a Wafer Coordinate System

Revision History

SEMI M12-0523 (technical revision)

SEMI M12-0706 (Reapproved 0318)

SEMI M12-0706 (Reapproved 1011)

SEMI M12-0706 (technical revision)

SEMI M12-1103 (technical revision)

SEMI M12-0303 (technical revision)

SEMI M12-0998E (editorial revision)

SEMI M12-0998 (technical revision)

SEMI M12-92 (technical revision)

SEMI M12-89 (technical revision)

SEMI M12-88 (first published)

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