SEMI A5 - Specification for Factory Operation Extension for SEMI A2 SMASH (SMASH-FOX) -

Abstract

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1  Purpose
1.1  The purpose of this Standard is to provide communication interface specifications that are used as extended specifications in conjunction with SEMI A2 for factory-level operations to be used mainly for factories that have multiple assembly lines with various equipment controlled by Local Hosts as required.
2  Scope
2.1  The scope of this Standard is to define communication interface specifications that support factory-level operations as an extension of SEMI A2. These include:
• System topology and communication path settings
• Method to use SEMI A2 messages from upper tier control entities such as the Factory Host
• Additional messages to be used for factory-level management

Referenced SEMI Standards (purchase separately)
SEMI A1 — Specification for Production Equipment Smart Connection Interface (PESCI)
SEMI A1.1 — Specification for TCP/IP Interface for Production Equipment Smart Connection Interface (PESCI)
SEMI A2 — Specification for Surface Mount Assembler Smart Hookup (SMASH)
SEMI E10 — Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization

Revision History
SEMI A5-0525 (technical revision)
SEMI A5-0722 (technical revision)
SEMI A5-0521 (first published)

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