SEMI C3.2 - Specification for Arsine (AsH3) in Cylinders, 99.94% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at and in February 2018; originally published in 1992; previously published June 2011.


The purpose of this Document is to provide specifications for arsine (AsH3) that is used in the semiconductor industry.


This Document covers requirements for arsine used in the semiconductor industry.


Referenced SEMI Standards

SEMI C3 — Specification for Gases

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