SEMI C3.6 - Specification for Phosphine (PH3) in Cylinders, 99.98% Quality -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.6-0421 - Current



The purpose of this Document is to provide specifications for phosphine (PH3) that are used in the semiconductor industry.

This Document covers requirements for phosphine used in the semiconductor industry.


Referenced SEMI Standards (purchase separately)

SEMI C3 — Specification for Gases


Revision History

SEMI C3.6-0421 (technical revision)

SEMI C3.6-0710 (Reapproved 0815)

SEMI C3.6-0710 (technical revision)

SEMI C3.6-0701 (technical revision)

SEMI C3.6-95 (technical revision)

SEMI C3.6-93 (technical revision)

SEMI C3.6-81 (first published)

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