SEMI C3.12 - Specification for Ammonia (NH3) in Cylinders, 99.998% Quality -
The purpose of this Standard is to provide specification for ammonia (NH3) that is used in the semiconductor industry.
This Standard covers requirements for ammonia used in the semiconductor industry.
Referenced SEMI Standards (purchase separately)
SEMI C3 — Specification for Gases
SEMI C3.12-0116 (Reapproved 0922)
SEMI C3.12-0116 (technical revision)
SEMI C3.12-1109 (technical revision)
SEMI C3.12-1102 (technical revision)
SEMI C3.12-94 (technical revision)
SEMI C3.12-89 (technical revision)
SEMI C3.12-86 (technical revision)
SEMI C3.12-83 (first published)
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