SEMI C3.18 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 97% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
Abstract

NOTICE: This document was replaced by SEMI C56 in 2005.

 

The purpose of this document is to provide a specification for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. This document covers requirements for Dichlorosilane (SiH2Cl2) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline.

 

Referenced SEMI Standards

None.

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