C00320 - SEMI C3.20 - Specification for Helium (He), in Cylinders, 99.9995%

SEMI C3.20 - Specification for Helium (He), in Cylinders, 99.9995% -

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Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.20-0414 (Reapproved 0319)E - Current

Revision

Abstract

The purpose of this Document is to provide specifications for helium (He) that is used in the semiconductor industry.

　

This Document covers requirements for helium used in the semiconductor industry.

　

Referenced SEMI Standards

SEMI C3 — Specification for Gases

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