SEMI C3.22 - Standard for Oxygen (O2), 99.5% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on July 11, 2004. Available at in November 2004; originally published in 1983; previously published in 1993.


NOTICE: This Document was balloted and approved for withdrawal in 2004.


Oxygen is a colorless, odorless and oxidizing gas. It supports combustion.


Referenced SEMI Standards


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