SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality -

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Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.24-0414 (Reapproved 0319)E - Current

Revision

Abstract

The purpose of this Document is to provide specifications for sulfur hexafluoride (SF6) that is used in the semiconductor industry.

 

This Document covers requirements for sulfur hexafluoride used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C3 — Specification for Gases

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