SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality -
The purpose of this Document is to provide specifications for sulfur hexafluoride (SF6) that is used in the semiconductor industry.
This Document covers requirements for sulfur hexafluoride used in the semiconductor industry.
Referenced SEMI Standards
SEMI C3 — Specification for Gases
Interested in purchasing additional SEMI Standards?
Consider SEMIViews, an online portal with access to over 1000 Standards.
Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.
This product has no reviews yet.