SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

The purpose of this Document is to provide specifications for sulfur hexafluoride (SF6) that is used in the semiconductor industry.


This Document covers requirements for sulfur hexafluoride used in the semiconductor industry.


Referenced SEMI Standards

SEMI C3 — Specification for Gases

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