SEMI C3.24 - Specification for Sulfur Hexafluoride (SF6) in Cylinders, 99.97% Quality
The purpose of this Document is to provide specifications for sulfur hexafluoride (SF6) that is used in the semiconductor industry.
This Document covers requirements for sulfur hexafluoride used in the semiconductor industry.
Referenced SEMI Standards
SEMI C3 — Specification for Gases