C00326 - SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality
NOTICE: This Document was balloted and approved for withdrawal in 2011. It was replaced by SEMI C70.
Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure.
Referenced SEMI Standards (purchase separately)
SEMI C3.26-0301 (Withdrawn 0312, replaced by SEMI C70)
SEMI C3.26-0301 (technical revision)
SEMI C3.26-94 (technical revision)
SEMI C3.26-93 (technical revision)
SEMI C3.26-89 (technical revision)
SEMI C3.26-84 (first published)
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