SEMI C3.26 - Specification for Tungsten Hexafluoride (WF6) in Cylinders, 99.8% Quality
This specification was technically approved by the global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on November 22, 2000. Initially available at www.semi.org January 2001; to be published March 2001. Originally published in 1984; previously published in 1994.
Tungsten hexafluoride is a colorless gas or colorless liquid. It is shipped as a liquefied gas under its own vapor pressure.
Referenced SEMI Standards