SEMI C3.28 - Standard for Nitrogen (N2), VLSI Grade in Cylinders, 99.9996% Quality -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.28-0200 (Withdrawn 0303) - Replaced



This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17, 1999. Available at in February 2000; originally published in 1985; previously published in 1996.


NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59.


Nitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earth’s atmosphere; colorless liquid; chemically unreactive. Noncombustible; an asphyxiant gas; cryogenic. Derived from liquid air by fractional distillation.


Referenced SEMI Standards


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