SEMI C3.29 - Standard for Nitrogen (N2), Bulk Gaseous, 99.9995% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on April 15, 1999. Available at in September 1999; originally published in 1986; previously published in 1996.


NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59.


Nitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earth’s atmosphere; colorless liquid; chemically unreactive. Noncombustible; an asphyxiant gas; cryogenic. Derived from liquid air by fractional distillation.


Referenced SEMI Standards


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