SEMI C3.31 - Specification for Dichlorosilane (SiH2Cl2) in Cylinders, 99% Quality (Provisional)
NOTICE: This document was replaced by SEMI C56 in 2005.
This specification was technically approved by the Global Gases Committee and is the direct responsibility of the North American Gases Committee. Current edition approved by the North American Regional Standards Committee on August 29, 2002. Initially available at www.semi.org September 2002; to be published November 2002. Originally published in 1986; previously published in 1994.
The purpose of this document is to provide a specification for dichlorosilane (SiH2Cl2) used in the semiconductor industry. This document covers requirements for dichlorosilane (SiH2Cl2) used in the semiconductor industry. If analytical methods are not complete, the requirements are presented as a guideline. This standard does not purport to address safety issues, if any, associated with its use. It is the responsibility of the user of these standards to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Dichlorosilane is a flammable, corrosive, colorless liquid which hydrolizes in the presence of moisture. It oxidizes readily and rapidly to release hydrogen chloride. It is easily ignited in the presence of air.
Referenced SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
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