C00332 - SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality

SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality -

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Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.32-0920 - Current

Revision

Abstract

The purpose of this Document is to provide specification for chlorine (Cl2) that is used in the semiconductor industry.

　

This Document covers requirements for chlorine used in the semiconductor industry.

　

Referenced SEMI Standards

None.

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