SEMI C3.32 - Specification for Chlorine (Cl2), 99.996% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to provide specification for chlorine (Cl2) that is used in the semiconductor industry.

 

This Document covers requirements for chlorine used in the semiconductor industry.

 

Referenced SEMI Standards

None.

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.
Member Price: $113.00
Regular price Non-Member Price: $150.00