SEMI C3.33 - Standard for Boron Trichloride (BCl3) (Provisional)
This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1987; previously published March 2003.
NOTICE: This Document was balloted and approved for withdrawal in 2011; replaced by SEMI C71, Specification and Guide for Boron Trichloride (BCI3).
Boron trichloride is a colorless gas at room temperature and atmospheric pressure which fumes in the presence of moist air. It has a choking odor.
Referenced SEMI Standards
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