C00334 - SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
Abstract


The purpose of this Standard is to provide a specification for disilane (Si2H6) used in the semiconductor industry.

This Standard covers requirements for disilane (Si2H6) used in the semiconductor industry.

If analytical methods are not complete, the requirements are presented as a guideline.

Referenced SEMI Standards (purchase separately)
SEMI C3 — Specification for Gases

Revision History
SEMI C3.34-0116 (Reapproved 0922)
SEMI C3.34-0116 (technical revision)
SEMI C3.34-1109 (technical revision)
SEMI C3.34-1102 (technical revision)
SEMI C3.34-92 (technical revision)
SEMI C3.34-90 (technical revision)
SEMI C3.34-89 (first published)

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00