SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.34-0116 (Reapproved 0922) - Current



The purpose of this Standard is to provide a specification for disilane (Si2H6) used in the semiconductor industry.

This Standard covers requirements for disilane (Si2H6) used in the semiconductor industry.

If analytical methods are not complete, the requirements are presented as a guideline.

Referenced SEMI Standards (purchase separately)
SEMI C3 — Specification for Gases

Revision History
SEMI C3.34-0116 (Reapproved 0922)
SEMI C3.34-0116 (technical revision)
SEMI C3.34-1109 (technical revision)
SEMI C3.34-1102 (technical revision)
SEMI C3.34-92 (technical revision)
SEMI C3.34-90 (technical revision)
SEMI C3.34-89 (first published)

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