SEMI C3.34 - Specification for Disilane (Si2H6) in Cylinders, 97% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 19, 2015. Available at and in January 2016; originally published in 1989; previously published November 2009.


The purpose of this Document is to provide a specification for disilane (Si2H6) used in the semiconductor industry.


This Document covers requirements for disilane (Si2H6) used in the semiconductor industry.


If analytical methods are not complete, the requirements are presented as a guideline.


Referenced SEMI Standards

SEMI C3 — Specifications for Gases

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