C00335 - SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality

SEMI C3.35 - Specification for Hydrogen Chloride (HCI), 99.997% Quality -

Member Price: $144.00
Non-Member Price: $187.00

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.35-0421 - Current

Revision

Abstract

The purpose of this Document is to provide specification for hydrogen chloride (HCl) that is used in the semiconductor industry.


This Document covers requirements for hydrogen chloride used in the semiconductor industry.

 

Referenced SEMI Standards (purchase separately)

None.

 

Revision History

SEMI C3.35-0421 (technical revision)

SEMI C3.35-1109E (Reapproved 0815)

SEMI C3.35-1109E (editorial revision)

SEMI C3.35-1109 (technical revision)

SEMI C3.35-1101 (technical revision)

SEMI C3.35-95 (technical revision)

SEMI C3.35-94 (technical revision)

SEMI C3.35-92 (technical revision)

SEMI C3.35-89 (technical revision)

SEMI C3.35-88 (first published)

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