SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to provide specification for hexafluoroethane (C2F6) that is used in the semiconductor industry.

 

This Document covers requirements for hexafluoroethane used in the semiconductor industry.

 

Referenced SEMI Standards

None.

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