SEMI C3.37 - Specification for Hexafluoroethane (C2F6), 99.97% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at and in June 2014; originally published in 1989; previously published November 2009.


The purpose of this Document is to provide specification for hexafluoroethane (C2F6) that is used in the semiconductor industry.


This Document covers requirements for hexafluoroethane used in the semiconductor industry.


Referenced SEMI Standards


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