SEMI C3.39 - 三フッ化窒素(NF3)99.98%品質の仕様 -

Member Price: $164.00
Non-Member Price: $215.00

Volume(s): Gases
Language: Japanese
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.39-1011 - Superseded

Revision

Abstract

本スタンダードは,global Gases Committeeで技術的に承認されている。現版は2011912日,global Audits and Reviews Subcommitteeにて発行が承認された。201110月にwww.semiviews.orgおよび www.semi.orgで入手可能となる。初版は1989年発行。前版は,20043月発行。

 

本文書の目的は,半導体産業で使用される三フッ化窒素(NF3)の仕様を提供することである。

 

Referenced SEMI Standards

None.

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