SEMI C3.39 - Specification for Nitrogen Trifluoride (NF3), 99.98% -

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Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.39-1011 (Reapproved 0118) - Current



This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at and in January 2018; originally published in 1984; previously published October 2011.


The purpose of this Document is to provide a specification for boron trifluoride (BF3) used in the semiconductor industry.


This Document covers requirements for boron trifluoride (BF3) used in the semiconductor industry.


If analytical methods are not complete, the requirements are presented as a guideline.


Referenced SEMI Standards


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