SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at and in February 2018; originally published in 1989; previously published October 2011.


The purpose of this Document is to provide specification for carbon tetrafluoride (CF4) that is used in the semiconductor industry.


This Document covers requirements for carbon tetrafluoride (CF4) used in the semiconductor industry.


Referenced SEMI Standards


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