C00340 - SEMI C3.40 - Specification for Carbon Tetrafluoride (CF4), 99.997% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 16, 2017. Available at www.semiviews.org and www.semi.org in February 2018; originally published in 1989; previously published October 2011.


The purpose of this Document is to provide specification for carbon tetrafluoride (CF4) that is used in the semiconductor industry.


This Document covers requirements for carbon tetrafluoride (CF4) used in the semiconductor industry.


Referenced SEMI Standards


Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $130.00
Regular price Non-Member Price: $170.00