SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional)
This Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in July 2001; originally published in 1990.
NOTICE: This Document was balloted and approved for withdrawal in 2001.
Hydrogen fluoride is a highly toxic, irritating and corrosive gas with a sharp, pungent odor. It is colorless and nonflammable, but reacts violently with most organic materials.
Referenced SEMI Standards