SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional)

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. Available at in July 2001; originally published in 1990.


NOTICE: This Document was balloted and approved for withdrawal in 2001.


Hydrogen fluoride is a highly toxic, irritating and corrosive gas with a sharp, pungent odor. It is colorless and nonflammable, but reacts violently with most organic materials.


Referenced SEMI Standards


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