SEMI C3.45 - Standard for Hexafluoroethane (C2F6), 99.996% Quality (Provisional)
This Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in July 2001; originally published in 1992.
NOTICE: This Document was balloted and approved for withdrawal in 2001.
Hexafluoroethane is one of the most stable of all organic compounds. It is inert, colorless, nonflammable, odorless and tasteless.
Referenced SEMI Standards