SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality -
Abstract
This Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in March 2003; originally published in 1994.
NOTICE: This Document was balloted and approved for withdrawal in 2003; it has been replaced by SEMI C59.
Nitrogen is an odorless, tasteless, diatomic gas comprising approximately 78% of the earth’s atmosphere; colorless liquid. Noncombustible; a cryogenic gas derived from liquid air by fractional distillation.
Referenced SEMI Standards
None.
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C00349 - SEMI C3.49 - Standard for Bulk Nitrogen (N2), 99.99999% Quality
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