SEMI C3.51 - Specification for Boron Trichloride (BCl3), 99.98% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at and in March 2012; originally published in 1995; previously published November 2011.


NOTICE: This Document was balloted and approved for withdrawal in 2012; it has been replaced by SEMI C71.


To define the specification and analytical methods and validate the specifications for BCl3.


This Specification relates to a geometry of 0.5 µ or less (0.35 to 0.5 range) and describes analytical techniques using gas phase analysis.


Referenced SEMI Standards


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