SEMI C3.52 - Standard for Tungsten Hexafluoride, 99.996% Quality -

Member Price: $138.00
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Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C3.52-0200 (Withdrawn 0312) - Replaced

Revision

Abstract

This Standard was technically approved by the global Gases Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in March 2012; originally published in 1995; previously published June 2000.

 

NOTICE: This Document was balloted and approved for withdrawal in 2011; replaced by SEMI C70.

 

To define the specification and analytical methods and validate the specifications for WF6.

 

Referenced SEMI Standards

None.

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