SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. Available at in July 2001; originally published in 1995.


NOTICE: This Document was balloted and approved for withdrawal in 2001.


Trifluoromethane (CHF3) is a colorless, nonflammable, noncorrosive gas with a slight ethereal odor. It is shipped in cylinders as a liquefied gas under its own vapor pressure.


Referenced SEMI Standards


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