SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)
Abstract

This Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in July 2001; originally published in 1995.

 

NOTICE: This Document was balloted and approved for withdrawal in 2001.

 

Trifluoromethane (CHF3) is a colorless, nonflammable, noncorrosive gas with a slight ethereal odor. It is shipped in cylinders as a liquefied gas under its own vapor pressure.

 

Referenced SEMI Standards

None.

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.
Member Price: $113.00
Regular price Non-Member Price: $150.00