C00353 - SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality
Volume(s):
Gases
Language:
English
Type:
Single Standards Download (.pdf)
Abstract
This Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in July 2001; originally published in 1995.
NOTICE: This Document was balloted and approved for withdrawal in 2001.
Trifluoromethane (CHF3) is a colorless, nonflammable, noncorrosive gas with a slight ethereal odor. It is shipped in cylinders as a liquefied gas under its own vapor pressure.
Referenced SEMI Standards
None.
Related Products
![]() |
Interested in purchasing additional SEMI Standards? Consider SEMIViews, an online portal with access to over 1000 Standards. |
Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.
Member Price:
$130.00
Regular price
Non-Member Price:
$170.00