SEMI C3.53 - Standard for Trifluoromethane (Chf3), 99.95% Quality
This Standard was technically approved by the Gases Global Technical Committee. Available at www.semi.org in July 2001; originally published in 1995.
NOTICE: This Document was balloted and approved for withdrawal in 2001.
Trifluoromethane (CHF3) is a colorless, nonflammable, noncorrosive gas with a slight ethereal odor. It is shipped in cylinders as a liquefied gas under its own vapor pressure.
Referenced SEMI Standards