SEMI C3.56 - Specification for Diborane Mixtures
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published June 2000; previously published March 2012.
To define the specification and analytical methods and validate the specifications for diborane mixtures.
Diborane is not used as a pure gas but as a mixture with balance gases of N2, H2, Ar, He, or SiH4.
The quality of the mixture is affected by a number of factors which include:
• the purity of the gases used for mixture preparation;
• component filling precision;
• the cylinder preparation process and in-situ reactions of diborane with the internal surface of the cylinder.
Furthermore, the elapsed time after filling is important due to the chemical instability, and hence decomposition, of the diborane (see Appendix 1).
All component gases shall adhere to the appropriate SEMI Specification, if available.
The quality of the final mixture can be checked after manufacturing by analyzing each cylinder for the concentration of diborane and for key impurities (tracers), namely H2, N2, O2.
Referenced SEMI Standards