SEMI C3.57 - Specification for Carbon Dioxide, CO2, Electronic Grade in Cylinders
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published June 2000; previously published March 2012.
The purpose of this Document is to provide specification for carbon dioxide (CO2) that is used in the semiconductor industry.
This Document covers requirements for carbon dioxide (CO2) that is used in the semiconductor industry.
Referenced SEMI Standards