SEMI C3.58 - Specification for Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 18, 0217. Available at www.semiviews.org and www.semi.org in April 2018; originally published June 2000; previously published October 2011.
The purpose of this Document is to provide specification for octafluorocyclobutane (C4F8), that is used in the semiconductor industry.
This Document covers requirements for octafluorocyclobutane (C4F8) used in the semiconductor industry.
Referenced SEMI Standards