SEMI C6.2 - Particle Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas

Volume(s): Gases
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at and in November 2011; originally published in 1993; previously published November 2002.


NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97.


The purposes of this Document are: (1) to set a maximum permissible particle concentration for 20/0.02 grade oxygen bulk supply gas, and (2) to describe a reference method for its verification.


This Document applies only to oxygen gas delivered through pipelines; it is not applicable to cylinder gas or oxygen gas in its liquid state.


Referenced SEMI Standards


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