SEMI C6.7 - Particle Specification for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on September 12, 2011. Available at www.semiviews.org and www.semi.org in November 2011; originally published in 1993; previously published November 2002.
NOTICE: This Document is no longer supported by the global technical committee. It has been replaced by SEMI C97.
The purposes of this Document are (1) to set a maximum permissible particle concentration for 10/0.2 grade cylinder nitrogen, and (2) to describe a reference method for its verification.
This Specification applies to nitrogen contained in high pressure gas cylinders; it is not applicable to pipeline gases.
Referenced SEMI Standards
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