SEMI C14 - Test Method for Particle Shedding Performance of 25 cm Gas Filter Cartridges
This Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 22, 2013. Available at www.semiviews.org and www.semi.org in September 2013. Originally published in 1995; previously published March 2009.
The purpose of this Document is to define a comprehensive standard test sequence to derive particle-related qualification data for 25 cm (10 inch) filter cartridges.
This Test Method defines a particle shedding evaluation method for 25 cm filter cartridges of various media (e.g., PTFE, PVDF, polycarbonate, nylon, and polysulfone) commonly used individually or in assemblies to remove particles from gas lines. The filter cartridges are separable from the housings which can be cleaned and tested independently.
Referenced SEMI Standards