SEMI C16 - Guide for Precision and Data Reporting Practices -
This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1997; previously published March 2005.
NOTICE: This document was balloted and approved for withdrawal in 2010.
To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI specification.
Referenced SEMI Standards
SEMI C1 — Specifications for Reagents
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