C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices

Volume(s): Gases / Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1997; previously published March 2005.


NOTICE: This document was balloted and approved for withdrawal in 2010.


To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI specification.


Referenced SEMI Standards

SEMI C1 — Specifications for Reagents

Related Products
Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.

Member Price: $113.00
Regular price Non-Member Price: $150.00