SEMI C16 - Guide for Precision and Data Reporting Practices -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Gases / Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
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Revision: SEMI C16-0299 (Withdrawn 1110) - Withdrawn



This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at in October 2010. Originally published in 1997; previously published March 2005.


NOTICE: This document was balloted and approved for withdrawal in 2010.


To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI specification.


Referenced SEMI Standards

SEMI C1 — Specifications for Reagents

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