C01600 - SEMI C16 - Guide for Precision and Data Reporting Practices

Volume(s): Gases / Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

This standard was technically approved by the global Liquid Chemicals Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on August 27, 2010. Initially available at www.semi.org in October 2010. Originally published in 1997; previously published March 2005.

 

NOTICE: This document was balloted and approved for withdrawal in 2010.

 

To provide a minimal set of guidelines for precision and data reporting practices for data supporting a Process Chemicals or Gases SEMI specification.

 

Referenced SEMI Standards

SEMI C1 — Specifications for Reagents

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