SEMI C18 - Specification for Acetic Acid

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at and in July 2014; originally published in 1978; previously published July 2008.


The purpose of this Document is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.


The scope of this Document is one grade of acetic acid used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C27 — Specifications and Guides for Hydrochloric Acid
SEMI C35 — Specifications and Guides for Nitric Acid
SEMI C44 — Specifications and Guides for Sulfuric Acid

Member Price: $113.00
Regular price Non-Member Price: $150.00