SEMI C18 - Specification for Acetic Acid -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

1  Purpose
1.1  The purpose of this Standard is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.
2  Scope
2.1  The scope of this Standard is one grade of acetic acid used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C27 — Specification and Guide for Hydrochloric Acid
SEMI C35 — Specification and Guide for Nitric Acid
SEMI C44 — Specification and Guide for Sulfuric Acid

Revision History
SEMI C18-0714 (Reapproved 0620)
SEMI C18-0714 (technical revision)
SEMI C18-0708 (technical revision)
SEMI C18-0301 (technical revision)
SEMI C18-0699 (first published - replaces SEMI C1.1)

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