SEMI C18 - Specification for Acetic Acid

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.

 

The scope of this Document is one grade of acetic acid used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C27 — Specification and Guide for Hydrochloric Acid
SEMI C35 — Specification and Guide for Nitric Acid
SEMI C44 — Specification and Guide for Sulfuric Acid

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