SEMI C19 - Specification for Acetone

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.

 

The scope of this Document is all grades of acetone used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals

SEMI C27 — Specification and Guide for Hydrochloric Acid

SEMI C35 — Specification and Guide for Nitric Acid

SEMI C44 — Specification and Guide for Sulfuric Acid


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