
SEMI C19 - Specification for Acetone -
Abstract
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
1 Purpose
1.1 The purpose of this Standard is to standardize requirements for acetone used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.
2 Scope
2.1 The scope of this Standard is all grades of acetone used in the semiconductor industry.
Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C27 — Specification and Guide for Hydrochloric Acid
SEMI C35 — Specification and Guide for Nitric Acid
SEMI C44 — Specification and Guide for Sulfuric Acid
Revision History
SEMI C19-0514 (technical revision)
SEMI C19-0708 (technical revision)
SEMI C19-0301 (technical revision)
SEMI C19-0699 (first published - replaces SEMI C1.2)
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