SEMI C20 - Specification and Guide for Ammonium Fluoride 40% -

Abstract

NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.

1  Purpose
1.1  The purpose of this Standard is to standardize requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Standard also provides guidelines for grades of ammonium fluoride 40% for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.
2  Scope
2.1  The scope of this Standard is all grades of ammonium fluoride 40% used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals

Revision History
SEMI C20-0213 (Reapproved 1218)
SEMI C20-0213 (technical revision)
SEMI C20-1101 (technical revision)
SEMI C20-0301 (technical revision)
SEMI C20-0699 (first published - replaces SEMI C1.3, SEMI C7.18, and SEMI C11.2)

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