SEMI C20 - Specification and Guide for Ammonium Fluoride 40%
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 17, 2018. Available at www.semiviews.org and www.semi.org in December 2018; originally published in 1978; previously published February 2013.
The purpose of this Standard is to standardize requirements for ammonium fluoride 40% used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Standard also provides guidelines for grades of ammonium fluoride 40% for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.
The scope of this Document is all grades of ammonium fluoride 40% used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals