SEMI C21 - Specification and Guide for Ammonium Hydroxide
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 13, 2017. Available at www.semiviews.org and www.semi.org in June 2018; originally published in 1978; previously published July 2008.
The purpose of this Document is to standardize requirements for ammonium hydroxide used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. This Document also provides guidelines for grades of ammonium hydroxide for which a need has been identified. In the case of the guidelines, the test methods may not have been statistically validated yet.
The scope of this Document is all grades of ammonium hydroxide used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals