SEMI C22 - Guide for Boron Tribromide
This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 24, 2011. Available at www.semiviews.org and www.semi.org in February 2012; originally published in 1994; previously published March 2006.
NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use.
The purpose of this Document is to provide a guide for a grade of boron tribromide for which a need has been identified.
This Document lists the proposed impurity limits of boron tribromide for a grade used in the semiconductor industry.
Referenced SEMI Standards
SEMI C1 — Guide for the Analysis of Liquid Chemicals