SEMI C23 - Specifications for Buffered Oxide Etchants

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)

This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at and in July 2014; originally published in 1981; previously published July 2008.


The purpose of this Document is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.


The scope of this Document is grades of buffered oxide etchants used in the semiconductor industry.


Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C35 — Specifications and Guides for Nitric Acid

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