SEMI C23 - Specifications for Buffered Oxide Etchants

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
Abstract

The purpose of this Document is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.

 

The scope of this Document is grades of buffered oxide etchants used in the semiconductor industry.

 

Referenced SEMI Standards

SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C35 — Specification and Guide for Nitric Acid

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