SEMI C23 - Specification for Buffered Oxide Etchants -

Member Price: $138.00
Non-Member Price: $180.00

Volume(s): Process Chemicals
Language: English
Type: Single Standards Download (.pdf)
SEMI Standards Copyright Policy/License Agreements

Revision: SEMI C23-0714 (Reapproved 0620)E - Current



The purpose of this Specification is to standardize requirements for buffered oxide etchants used in the semiconductor industry and testing procedures to support those standards. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.

The scope of this Specification is grades of buffered oxide etchants used in the semiconductor industry.

Referenced SEMI Standards (purchase separately)
SEMI C1 — Guide for the Analysis of Liquid Chemicals
SEMI C35 — Specification and Guide for Nitric Acid

Revision History
SEMI C23-0714 (Reapproved 0620)E
SEMI C23-0714 (Reapproved 0620)
SEMI C23-0714 (technical revision)
SEMI C23-0708 (technical revision)
SEMI C23-0301 (technical revision)
SEMI C23-0699 (first published)

Interested in purchasing additional SEMI Standards?

Consider SEMIViews, an online portal with access to over 1000 Standards.

Refund Policy: Due to the nature of our products, SEMI has a no refund/no exchange policy. Please make sure that you have reviewed your order prior to finalizing your purchase. All sales are final.